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VS2013u1 publishing occasionally get directory is not empty error

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When I publish website to local drive through Publish Web button on VS2013 u1, I get

Error    1    Unable to remove directory "obj\Debug\AspnetCompileMerge\TempBuildDir". The directory is not empty.


sometimes. And some other times, I got

2>Deleting existing files...
2>Error deleting file 'Areas'.  Unable to delete 'Areas'.  The directory is not empty.

at end of publishing.

It is not a sever bug since I can reclick the button, and normally in two or three tries, it can publish web without problem.

publishing web through MSBuild command line has no problem so far.


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